THERMANSYS HTP-MA1-200 PRF Vacuum Chuck Heated Plates family was designed to provide accurate and uniform surface temperature control. Ideal choice for heating thin film substrates, wafers or flexible thin membranes. Controlled and monitored through a flexible conduit by a remote control box.
The heated body is made from Aluminum providing superior heat transfer and temperature uniformity. A perforated anodized Aluminum plate on top of the heated body allows for air suction through the holes. This way keep the heat treated substrate attached uniformly with the heated surface enchasing significantly the heat transfer. The perforated plate is detachable for easy cleaning. The outer shell of the heated plate body is made of corrosion-free stainless steel ASTM 304.
A Pt100 temperature sensor is measuring directly the heated surface temperature. A PID algorithm is maintain accurately the user selected temperature or temperature profile program.
A hose connector at the side of the hot plate allows for an external pump connection. The HTP-MA1-200 PRF control box provide a power output for the pump. The on-off operation of the pump can be controlled though the system interface.
Suitable for many applications including Electronics/Semiconductors, Pharmaceuticals/Cosmetics, Plastics, Agricultural and other.
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