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Only Quality

Precision Vacuum Hot Plates

Vacuum Chuck Heated Plates-Thin Film-Membrane Heating and Drying

Categories: Code: HTP-MA1-200-PRF
THERMANSYS HTP-MA1-200 PRF Vacuum Chuck Heated Plates family was designed to provide accurate and uniform surface temperature control. Ideal choice for heating thin film substrates, wafers or flexible thin membranes. Controlled and monitored through a flexible conduit by a remote control box.
The heated body is made from Aluminum providing superior heat transfer and temperature uniformity. A perforated anodized Aluminum plate on top of the heated body allows for air suction through the holes. This way keep the heat treated substrate attached uniformly with the heated surface enchasing significantly the heat transfer. The perforated plate is detachable for easy cleaning. The outer shell of the heated plate body is made of corrosion-free stainless steel ASTM 304.
A Pt100 temperature sensor is measuring directly the heated surface temperature. A PID algorithm is maintain accurately the user selected temperature or temperature profile program.
A hose connector at the side of the hot plate allows for an external pump connection. The HTP-MA1-200 PRF control box provide a power output for the pump. The on-off operation of the pump can be controlled though the system interface.
Suitable for many applications including Electronics/Semiconductors, Pharmaceuticals/Cosmetics, Plastics, Agricultural and other.
See prices and availability online at THERMANSYS e-shop

Key Features

  • Control strategy by Thermansys PCC (Power Consistent Control) insures silent operation and compliance with EMC standards.
  • Aluminum heated surface enhance fast and uniform heat transfer.
  • Outer shell made of corrosion-free stainless steel ASTM 304.
  • Detachable Perforate Anodized Aluminum Plate on top
  • Remote, touch screen temperature controller, running the specially designed  PYROLOGISM 2.0 software on a 10.0in Tablet PC
  • Remote controller. Standard equipped with LCD display.
  • Heater failure, open control thermocouple detection alarms and interlocks.
  • Safety Thermostat.


  • Temperature control range, 5 ˚C above ambient to 200 ˚C. Monitoring resolution 0.1 ˚C.
  • Operating Power: 230VAC – 50/60Hz.
  • Pt100 type temperature sensor.
  • Temperature control setting resolution 0.1 ˚C. Typical control fluctuation ±0.1 ˚C PID control.
  • Burst firing insures silent operation and compliance with EMC standards.
  • Heater galvanic isolation relay. Heater failure, thyristor failure, temperature sensor failure, alarms and interlocks.
  • Safety thermostat.


For detailed ordering and technical information please see our technical brochures:
Maximum Temperature 200 °C, Heated Surface 18x18 to 40x40cm
Model No Max. Temperature (C) Heated Surface
HTP-AM1-L18W18-200-PRF 200 18x18cm
HTP-AM1-L30W18-200-PRF 200 30x18cm
HTP-AM1-L30W30-200-PRF 200 30x30cm
HTP-AM1-L40W18-200-PRF 200 40x18cm
HTP-AM1-L40W30-200-PRF 200 40x30cm
HTP-AM1-L40W40-200-PRF 200 40x40cm
HTP-MA1-200-PRF_January 2019